VB界面下用并口实现多通道质量流量计自动化控制

Automatization of Multi-Channel Mass Flow Controller Under VB Interface

分析了MKS公司生产的气体流量控制系统247CFour-ChannelReadout的工作原理,并通过实验得出系统的工作曲线,并设计出该仪器与PC并口的接口电路。控制软件用VB高级语言编写,界面友好,操作简便。其实现方法可供一般微电压信号控制仪器的自动化改进参考。

The work theory of 247C Four-channel Readout produced by MKS corporation is expounded in this paper,then the voltage-flow curve of the equipment is obtained through a experiment in typical work condition. Based on the curve,a control circle and program were designed.This circle and program could give some reference to the automatization of the equipment that dominated by weak-voltage too.