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样品磁透镜对绝缘样品XPS分析的影响 被引量:2

Influence of the Magnetic Lens on XPS Analysis of Insulating Specimens
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摘要 用XPS分析绝缘样品时,启用样品磁透镜有可能引起谱峰位移和峰形畸变,其原因是磁透镜的磁场与双阳极铝窗发出的低能电子发生了相互作用,并使后者偏转,从而影响了到达样品表面起中和作用的低能电子的数量和分布.实验显示,用与不用磁透镜所造成的谱峰差异,有可能被用来研究绝缘样品的光导现象. Peak shift and spectra distortion have been observed in XPS analysis of insulating specimens when the magnetic lens is activated. This has been attributed to the interaction between magnetic fields of the magnetic lens and low energy electrons from A1 window of the twin anode X-ray source, which causes deflection of the low energy electrons, affects the quantity and distribution of the low energy electrons that reachec the sample, and so that affects the neutralization of positive charge on sample surface. It is also shown that the spectra differences caused by actiyating the magnetic lens and not may be used to study photoconductive phenomenon of insulating specimens.
出处 《分析测试技术与仪器》 CAS 2005年第3期163-166,共4页 Analysis and Testing Technology and Instruments
关键词 XPS 磁透镜 绝缘样品 荷电效应 XPS magnetic lens insulating samples charging effect
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参考文献2

  • 1Robinson K S, Street F J, Drummond I W. Magnetic lens technology in X-ray Photoelectron-Spectroscopy (XPS)-facts and fallacies[J]. Inst Phys Conf Ser, 1993, 130(6): 451-454.
  • 2Forsyth N M, Coxon P. Use of parallel imaging XPS to perform rapid analysis of polymer surfaces with spatial-resulution less-than-5-mu[J]. Surf Interface Anal, 1994, 21: 430.

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