一种基于分子印章法的生物芯片压印装置

Instrument for Biochip Imprinting by Molecular Stamp Method

高密度生物芯片技术是后基因组时代进行疾病高通量初步筛选的主要工具之一。高密度芯片的制备一直是生物芯片研究的基本问题。通常有两种方法:(1)基于光刻的工艺方法;(2)基于分子印章的压印工艺方法。根据提出的分子印章法成功研制了一种基于分子印章法的生物芯片压印装置。本文介绍了研制的高密度生物芯片压印装置。该装置是从研制的大面积扫描探针显微镜的硬件基础上改造而得。研制的精密定位的工作台精度如下:工作台尺寸为300 mm×350 mm×70 mm;分辨率为1μm;最小步进距离为100 nm;定位重复性为±2μm。为了获得相关生物芯片的合成环境,整个装置放置在大容量的手套箱中。文中介绍了相关部件的主要技术指标、控制方法和关键部件的研制,并分析相关误差的产生和消除方法。最后给出相关实验的结果。

According to the molecular stamp method, a kind of new instruments is developed. The instrument is modified from the home-made scanning probe microscope. The characters of the X-Y stage are as follows ： range ： 300 mm × 350 mm × 70 mm ; resolution ： 1μm ; minimal distance ： 100 nm ; repeatability： ±2μm. The Z contacting angle error is about 0.01°, and the distance error of Z-direction is 0.5μm. Meanwhile, a kind of contacting zone monitoring systems by CCD is also developed, and the contacting angle can be adjusted to reach the minimal angle error. To finish the synthesis process, the cleaning pool is also designed with PZT vibration mixing parts to provide 300Hz vibration. Finally, the experimental result of the synthesized high-density biochip is also provided.