摘要
本文对纳米晶Ti-Si-N超硬涂层材料国内外研究进展进行了系统的回顾,着重分析了制备方法(等离子增强化学气相沉积,等离子辅助化学气相沉积,直流磁控溅射和射频磁控溅射等)、工艺参数(沉积温度,进气比)和硅含量对Ti-Si-N微观结构、硬度、抗氧化性、耐腐蚀性和耐磨性的影响。在合适的工艺条件下,能获得硬度最高的纳米TiN晶体镶嵌在非晶态的Si3N4基体上的复合涂层(nc-TiN/a-Si3N4)。该涂层有良好的性能并将得到广泛的应用。
In this paper the development of the nanocrystalline superhard Ti - Si - N coatings at home and abroad is systematically reviewed. Effect of their manufacturing process （plasma enhanced chemical vapor deposition, plasma assisted chemical vapor deposition, D.C. magnetron sputtering, r.f. magnetron sputtering） pararheters （deposition temperature and N2/Ar ratio） and Si content on microstructure, hardness, oxidation resistance , corrosion resistance and wear resistance is analyzed. Under a proper process condition , a nanocomposite layer composed of nanocrystallite grains of TiN embedded in an amorphous silicon nitride phase nc-TiN/a-Si3N4 can be formed, which has the most highest hardness, good properties and will be widely used.
出处
《粉末冶金技术》
EI
CAS
CSCD
北大核心
2005年第5期383-387,共5页
Powder Metallurgy Technology
