基于“荷花效应”的MEMS功能表面仿生技术

Research on Bionic Functional Surface of MEMS Based on Lotus Effect

微机电系统(MEMS)正在成为新崛起的大规模产业和各国政府竞争的至高点,但随着其特征尺度的日趋减小,表面效应显著增强,由此引起的摩擦磨损、表面粘附等问题成为制约MEMS发展的瓶颈。论证了“荷花效应”应用于MEMS领域仿粘减摩的机理,探讨了类荷叶仿生功能表面的制作方法,并给出了初步试验结果。

MEMS is becoming a promising and mass production industry, and thus it is a competition focus among all countries. However, with the miniature of feature sizes, surface effect is substantially increased, and the resulting friction, abrasion and stiction are becoming bottlenecks of the development of the MEMS industry. In this paper, the feasibility of lotus effect applied in MEMS to prevent stiction or reduce friction was protosed and investigated, and approaches of fabricating lotus effect surface, as well as some preliminary experiment results were presented.