基于运动控制技术的非球面测量系统

An Aspheric Surface Measurement System Based on the Technology of Motion Control

为满足非球面光学元件表面精度的测量要求,设计和实现了一种高效数控非球面测量系统.系统基于运动控制技术,构建了四轴联动的测量工作平台.根据数据采集原理,实现对非球面工件表面形位参数进行连续采样.整个系统采用工控微机作为上位机非实时控制,下位机采用高速DSP进行实时控制.在Windows操作系统下,用Visaul C++开发工具完成了测量系统的软件开发.最后通过实验对测量系统的稳定性及其误差进行了分析.实验结果表明.系统行程为100～120 mm,系统误差小于5 μm,能满足普通光学非球面元件测量精度的要求,同时系统体现了较好的通用性和可靠性.

According to the requirement of the high precision aspheric surface measurement,an effective aspheric surface measure- ment system is designed and realized. System is based on the motion control and data requirement technology. A four-axis NC worktable is established,which realizes acquiring data of the aspheric surface successively. Industrial PC is used as a central control unit and DSP is used as a real-time processor, with the windows operating system and Visual C＋＋, and software developing is also finished. The capability of system is analyzed by experiments. The result shows that the maximal range of measurement is from100 mm to 120 mm with the error data less than 5μm. And the result has testified the reliability of the system and reached the demand of high precision measurement.