摘要
通过对湿敏材料-聚酰亚胺(PI)的湿敏机理的分析,设计了高分子电容式湿度传感器的芯片结构,并对其制作工艺进行了详细讨论.在此基础上,对传感器变送电路进行了研究,设计了以双时基电路为主的信号处理电路,并最终制备出了输出电压随环境相对湿度线性变化的湿度传感器.对湿度传感器的湿敏特性的测试表明:在1.82%～91.04%RH范围内,带湿度处理电路的湿度传感器输出的信号与环境的相对湿度成线性变化,电路能对湿度电容输出电容量进行放大.
Through the analysis of the polyimide humidity sensitive mechanism, the structure of humidity sensor was designed and the humidity sensor manufacture process was discussed in detailed. Through the research of the sensor transducer circuit, the signal process circuit was designed mainly through dual timer IC, Finally, the humidity sensor, which the change of output voltage followed was fabricated. The test for the sensitivity of humidity sensor shows that the humidity sensitive curve is very linear corresponding to environment humidity from 1.82%RH to 91.04%RH , and the signal process circuit could amplify the output capacity which represents change of environment humidity,
出处
《仪表技术与传感器》
CSCD
北大核心
2005年第10期4-5,8,共3页
Instrument Technique and Sensor
基金
部级预研项目基金资助(323030411)
