摘要
利用磁控溅射的方法,在热玻璃基片上制备了[Fe/Pt]n多层膜,经不同温度真空热处理后,得到L10有序结构的FePt薄膜(L10-FePt)。实验结果表明:[Fe/Pt]n多层膜结构可使FePt薄膜的有序化温度由500℃降到350℃,350℃退火20 min后其平行膜面矫顽力可达到421.8kA.m-1。同时以Ag,Ti,Cu和Pt做底层,利用[Fe/Pt]n多层膜结构制备了FePt薄膜,磁性和X射线衍射结果表明:与[Fe/Pt]n多层膜相比,四种底层均没有进一步降低FePt薄膜的有序化温度,其中Ag做底层对[Fe/Pt]n多层膜退火后的平行膜面矫顽力影响较小,但能够提高其垂直磁各向异性;其他底层均会降低[Fe/Pt]n多层膜在高温退火时的平行膜面矫顽力,且对其垂直磁各向异性无改善作用。
The Fe/Pt muhilayer films were deposited by magnetron sputtering on the heated glass substrates, and the FePt thin films with the ordering phase, L10-FePt, were obtained after the as-deposited samples were subjected to vacuum annealing at various temperatures. Results show that the Fe/Pt multilayer structure can effectively reduce the ordering temperature of the FePt film from 500 to 350℃, and the inplane coercivity can reach 421.8 kA·m^-1 after the Fe/ Pt muhilayer film is annealed at 350℃ for 20 min. Meanwhile, the Fe/Pt multilayer films with Ag, Ti, Pt or Cu underlayer were also prepared. It is demonstrated from the magnetic performance and X-ray diffraction patterns that the ordering temperature of the Fe/Pt multilayer film with any underlayer is no lower than that of the Fe/Pt multilayer film. Ag underlayer has little effect on the in-plane coercivity of Fe/Pt multilayer film which is susceptible to other underlayers. The perpendicular uniaxial magnetic anisotropy of the Fe/Pt muhilayer film can be enhanced with Ag underlayer but can not be beneficial from the other underlayers.
出处
《稀有金属》
EI
CAS
CSCD
北大核心
2005年第5期752-756,共5页
Chinese Journal of Rare Metals
基金
教育部博士点基金(2003008003)
教育部科学技术研究重要项目(104023)资助
