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超窄带滤光片制作技术 被引量:14

PREPARATION TECHNIQUE OF ULTRANARROW BANDPASS OPTICAL THIN FILM FILTERS
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摘要 详细地介绍了超窄带滤光片的制作技术。讨论了在基底材料选择、膜系设计以及膜厚监控等方面要求的特殊性,并给出了一些滤光片设计和监控的要求。它在空间遥感尤其是在闪电探测方面具有重要的作用。 Preparation technique of ultranarrow bandpass optical thin film filters has been described in detail. The particular requirement on substrate materials selecting, thin film structure design and monitor and control of thin film thickness has been discussed.
作者 熊玉卿
机构地区 兰州物理研究所
出处 《真空与低温》 2005年第3期125-130,共6页 Vacuum and Cryogenics
关键词 超窄带滤光片 基底材料 设计 监控 ultra- narrow band pass filter substrate material design monitor and control
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参考文献9

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  • 9杨毓铭,顾培夫,刘旭.膜厚监控系统的光谱宽度对波分复用窄带滤光片性能的影响[J].仪器仪表学报,2002,23(z3):12-14. 被引量:1

二级参考文献11

  • 1[1]Macleod H A.Thin-Film Optical Filters. Secondedition. London:Adam Hilger Ltd, Bristol. 1986,chap.10.
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  • 7Takashashi H. Temperature Stability of thin-film narrow-bandpass filters produced by ion-assisted deposition.Appl. Opt., 1995, 34(4):667-675.
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