摘要
由外冷式吸附泵作为前级泵、溅射离子泵作为主抽真空泵构成无油超高真空系统,采用计算机控制技术,以真空度为工艺进程判据,对器件进行烘烤排气,实现电真空器件的真空排气工艺的自动控制。介绍了无油超高真空系统、控制系统、烘箱与热功率以及软件的设计。排气台为多工位结构,具有气体质谱分析和充气功能;空载时极限真空度优于8×10-7Pa;烘箱烘烤温度为25～600℃,连续可调,恒温精度优于±1%;分析质量数为1～80。程控排气台设计合理,操作简便,计算机控制技术精细了工艺过程控制量,排除了人为因素,其性能稳定可靠,可满足使用要求。
The adsorption pump is the former pump, The iron pump is the main part of the oil free vacuum system. The vacuum degree is judged as criterion by computer automatically to heated the apparatus. Oil free high vacuum system, control system, heat system, it＇ s power and the control program have been introduced. The system can analyze the gas spectrum and charge gas. The vacuum limit reach 8 x 10-7 Pa. The heat temperature is from room temperature to 600 ~C. The constant temperature overmatch ± 1%. The analyze mass number is from 1 to 80. The system design reasonably operate simply. Due to the computer control, precise control actor have been used. The artificial factor have been removed.
出处
《真空与低温》
2005年第3期170-174,共5页
Vacuum and Cryogenics
关键词
无油超高真空系统
真空度
程控工艺
oil free high vacuum system
vacuum degree
programmed control
