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Adsorption and diffusion of Si adatom near single-layer steps on Si surface

Adsorption and diffusion of Si adatom near single-layer steps on Si surface
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摘要 By use of the empirical tight-binding (ETB) method, the adsorption and diffusion behaviours ot single sllmon adatom on the reconstructed Si(100) surface with single-layer steps are simulated. The adsorption energies around the SA step, nonrebonded SB step, rebonded SB step, and rough SB step with a kink structure are specially mapped out in this paper, from which the favourable binding sites and several possible diffusion paths are achieved. Because of the rebonded and kink structures, the SB step is more ~uitable for the attachment of Si adatom than the SA step or defective surface. By use of the empirical tight-binding (ETB) method, the adsorption and diffusion behaviours ot single sllmon adatom on the reconstructed Si(100) surface with single-layer steps are simulated. The adsorption energies around the SA step, nonrebonded SB step, rebonded SB step, and rough SB step with a kink structure are specially mapped out in this paper, from which the favourable binding sites and several possible diffusion paths are achieved. Because of the rebonded and kink structures, the SB step is more ~uitable for the attachment of Si adatom than the SA step or defective surface.
作者 朱晓焱 黄燕
出处 《Chinese Physics B》 SCIE EI CAS CSCD 2005年第10期2083-2089,共7页 中国物理B(英文版)
基金 Project supported by the National Natural Science Foundation of China (Grant No 10374069) and the National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences (Grant No 200412).
关键词 STEP adsorption DIFFUSION empirical tight-binding step, adsorption, diffusion, empirical tight-binding
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