二次氮化连续生产Si_3N_4粉工艺因素研究

Study on process factors of Si_3N_4 fine continuously produced by secondary nitrizing process

对二次氮化连续生产Ｓｉ_３Ｎ_４粉新工艺的主要工艺因素进行了研究，优选出一套最佳的工艺参数，并生产出了优质Ｓｉ３Ｎ４粉。

The main process factors of producing Si3N4 fine continuously by secondary nitrizing process have been studied.Optimal diameters have been selected and high quality Si3N4 fine has been developed.