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Microstructure and physical properties of PVD TiN/(Ti, Al)N multilayer coatings 被引量：1

Microstructure and physical properties of PVD TiN/(Ti, Al)N multilayer coatings
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摘要 Magnetron sputtered (Ti, Al)N monolayer and TiN/(Ti, Al)N multilayer coatings grown on cemented carbide substrates were studied by using energy dispersive X-ray spectroscopy (EDX), scanning electron microscopy(SEM), nanoindentation, Rockwell A indentation test, strength measurements and cutting tests. The results show that the (Ti, Al)N monolayer and TiN/(Ti, Al)N multilayer coatings perform good affinity to substrate, and the TiN/(Ti, Al)N multilayer coating exhibits higher hardness, higher toughness and better cutting performance compared with the (Ti, Al)N monolayer coating. Moreover, the strength measurement indicates that the physical vapour deposition (PVD) coating has no effect on the substrate strength. Magnetron sputtered （Ti, Al） N monolayer and TiN/（Ti, Al） N multilayer coatings grown on cemented carbide substrates were studied by using energy dispersive X-ray spectroscopy （EDX）, scanning electron microscopy （SEM）, nanoindentation, Rockwell A indentation test, strength measurements and cutting tests. The results show that the （Ti, Al）N monolayer and TiN/（Ti, Al）N multilayer coatings perform good affinity to substrate, and the TiN/（Ti, Al）N multilayer coating exhibits higher hardness, higher toughness and better cutting performance compared with the （Ti, Al）N monolayer coating. Moreover, the strength measurement indicates that the physical vapour deposition （PVD） coating has no effect on the substrate strength.
作者 吴恩熙 陈利 尹飞 汪秀全
机构地区 State Key Laboratory of Powder Metallurgy State Key Laboratory of Powder Metallurgy
出处 《中国有色金属学会会刊：英文版》 EI CSCD 2005年第5期1072-1076,共5页 Transactions of Nonferrous Metals Society of China
关键词 钛 锡 多层结构 涂层 微观结构 物理性能 金属表面防护 PVD （Ti, Al）N monolayer coating TiN/（Ti, Al）N multilayer coatings cemented carbide
分类号 TG174.4 [金属学及工艺—金属表面处理]
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参考文献18

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同被引文献22

  • 1李成明,张勇,曹尔妍,薛明伦.磁过滤对多弧离子镀(TiAl)N薄膜的影响[J].中国有色金属学报,2001,11(z1):179-182. 被引量：11
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中国有色金属学会会刊：英文版
2005年 第5期

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