摘要
用集成在芯片上的光纤作为激发光源,可使激发光斑的大小与微流控沟道的深度尺寸相接近,提高了检测灵敏度,省去了光学聚焦系统。利用二次曝光的方法制作了PDMS光纤芯片,实现了光纤与沟道的对准。对PDMS光纤芯片的加工工艺、封装方法和结构特征进行了探讨。用所制作的芯片对FITC(异硫氰酸荧光素)和以FITC标记的氨基酸进行了检测,结果证明了该芯片的可行性。
The fiber integrated on the chip was used as excitation light source, which makes the size of the light spot was near the depth of microfluidic channel to improve the detection sensitivity and spare the optical focusing system. The PDMS microfluidic fiber chip was fabricated with twice exposure method to realize the alignment of the light spot and the microfluidic channel. The fabrication process, sealing method and structure characteristics of PDMS fiber chips were discussed. The fabricated chip is tested with FITC fluorescein and FITC-labeled amino acid mixture reagent. The experiment result approves the feasibility of the chip.
出处
《微细加工技术》
EI
2005年第3期57-61,共5页
Microfabrication Technology
基金
国家自然科学基金重大项目资助(2029903060341005)
