摘要
Determination of the energy range is an important precondition of focus calibration using alignment procedure （FOCAL） test. A new method to determine the energy range of FOCAL off-lined is presented in this paper. Independent of the lithographic tool, the method is time-saving and effective. The influences of some process factors, e.g. resist thickness, post exposure bake （PEB） temperature, PEB time and development time, on the energy range of FOCAL are analyzed.
Determination of the energy range is an important precondition of focus calibration using alignment procedure （FOCAL） test. A new method to determine the energy range of FOCAL off-lined is presented in this paper. Independent of the lithographic tool, the method is time-saving and effective. The influences of some process factors, e.g. resist thickness, post exposure bake （PEB） temperature, PEB time and development time, on the energy range of FOCAL are analyzed.
