动态目标发生器圆鼓图形光刻掩模板的研制

Design or Mask for Dynamic Aim Generator Image

本文详细论述了动态目标发生器圆鼓图形光学刻划掩模板的设计思想及其制作过程，经试刻效果良好．为非球面光刻掩模板的制作开创了一条新途径。

This paper describes design idea of mask manufacture of dynamic aim generator imageand its mading process.It was used in experimental lithography and got a better result.Anew method was found for the manufacture of nonglobal mask.