新型微变位致动器的发展及应用

Development and Applications or New Micro-motion Actuators

对目前新出现的几种高精度微变位致动器的性能特点进行了分析，介绍了它们在高新技术领域，特别是在微纳技术领域中的应用。

The characters of several new types of micro-motion actuators is analyzed and theirapplications in some advanced fields, such as MEMS and Nanotechnology is introduced inthis paper.