行波式压电微电机的等效电路特性

Equivalent Circuit's Characteristics of a Micro Traveling Wave Piezoelectric Motor

本文通过对行波式压电微电机原理性的分析，并结合质点运动学基础理论，研究了压电微电机换能理论，建立了电机等效电路。该方法将为深入研究压电微电机的力矩、功率、以及效率提供有力的理论基础。

This paper analyses the principle of a micro traveling wave piezoelectric motor, studiesthe principle from electrical energy to mechanical energy in PZT depending on the particleskinematics, and establishes the equivalent circuit of this motor. The method will supply thebasic principle for the research of the torque, power and efficiency of this motor.