火焰法在硬质合金上合成金刚石薄膜

Diamond Films Synthesized on WC Co Alloy Substrates by Combustion Flame

用Ｏ２／Ｃ２Ｈ２燃烧火焰法在各种不同性质的衬底材料上直接合成金刚石薄膜，研究了硬质合金刀头在不同的冷却方式下，对合成金刚石膜的影响。结果表明：ＹＧ６硬质合金由于Ｃｏ的存在影响了金刚石膜的质量；当冷却方法不当时，硬质合金刀头刃部易过热；

Diamond thin films were synthesized on single crystalline silicon, TC4 titanium and WC Co alloy substrates by combustion flame. Effect of various cooling methods for the substrates on the quality of diamond thin films was investigated. The tip of WC Co alloy substrates was easy to overheat under inappropriate cooling conditions. The adhesion between diamond film and WC Co alloy was enhanced by a three step deposition process that involved removing Co from the surface, enhancing the nucleation density, and normal deposition.