摘要
在MEMS中,由于制造工艺的不同,形成了不同的多层材料结构。因此,在MEMS设计中必须针对多层材料结构形式进行分析。同时,由于它们的功能要求差异和使用环境的不同,必须对其进行必要的结构分析,以最佳的结构性能,最低的制造成本满足使用要求。文中提出MEMS中基于制造工艺的多层材料结构分析的方法.并应用该方法针对加速度微阵列式传感器进行结构分析计算,设计并制造了式样。在ENDVCO2270设备上进行测试,获得62500g的加速度测试值。
The different multiple material structure is formed with different manufacturing processes in MEMS. This paper presents the method of the structure analysis for the multiple material based on the different manu- facturing processes in MEMS. Meanwhile, because the difference of their function and environmental, the structure analysis must be done to meet the operation requirement by the optimum performance of the structure and the lowest manufacturing cost. The paper researches this analysis method by which the sample for the mi- cro array sensors of the acceleration have been designed and manufactured. It is tested in the equipment of ENDVCO 2270, the acceleration test value of the 62500g is acquired.
出处
《电子机械工程》
2005年第5期47-50,共4页
Electro-Mechanical Engineering
关键词
MEMS
多层材料
结构分析
制造过程
MEMS
multiple material
structure analysis
manufacturing processes
