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微显示器和晶圆技术的现状及展望 被引量：1

Status and Prospectus of Silicon-Based Microdisplay and Wafer Process Technology
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摘要 介绍LCD、DMD和LCOS三大主流微显示器的构造、制作和基于微显示技术的投影显示基本原理,并展望其发展趋势及中芯国际的LCOS开发成果。 Introduction is provided to the microstructure of the three main-stream microdisplay device technologies, LCD, DMD and LCOS, and the electrical-optical operating principles of these micro device operation for projection display, A prospective analysis is also presented on their future development besides the status report on the LCOS backplane wafer process technology development at SMIC.
作者 黄河 蒲贤勇 唐德明
机构地区 中芯国际集成电路制造有限公司
出处 《现代显示》 2005年第10期10-18,共9页 Advanced Display
关键词 微显示器 晶圆制造技术 投影显示 microdisplay silicon wafer manufacturing technology projection display,
分类号 TN873 [电子电信—信息与通信工程]
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现代显示
2005年 第10期

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