高效集成电光调制器和开关的电极与光波导的优化设计

Optimal Electrode and Waveguide Design for High Efficiency Integrated Optic Modulatos and Switches

集成电光调制与开关的效率取决于光波导中电光重叠因子Γ的大小，直接影响此因子的有电极宽度、电极间距、光模场尺寸、以及电极与光波导的相对位置等参量。本文利用集成电光调制器电极电场的分布规律，研究了各种结构中影响电光重叠因子的诸参量之间的关系；根据实际工艺条件，应用系统优化方法尽可能对各种参量进行优化计算。

Effciency of an integrated optic modulator/switch depends on the overlap integral between the applied electric field and the optical mode. In this work, the field distribution of electrodes is analysed to determine the maximum overlap integral affected by the parameters of electrode width, interelectrode gap and optical mode size etc.. The results of the optimal electrode and waveguide design for Ti∶LiNbO 3 modulators/switches are presented by utilizing a systematic optimization of all the necessary parameters according to the available technology.