微机电系统的尺度效应及其影响

The Microscopic Scales with Macroscopic Impact in Micro Electro Mechanical Systems (MEMS)

评述了MEMS系统中,尺度效应对材料性能、器件的机械特性、流体系统以及摩擦和粘附等方面的影响,微尺度效应是在微机电系统的设计过程必须考虑的问题,也是MEMS产品从实验室走向市场化商品的关键理论基础。

The Influence of scaling on material properties, mechanical characters of micro-device, microfluidic system and Microfriction and micro-adhere is reviewed in this paper. The scaling effect should be taken into account In MEMS design stage. And the researching on microscopic scales impacts is one of key issues for converting those smart devices into commercially successful products.