摘要
利用等离子尖端放电、空心阴极效应和反应气相沉积技术,在碳钢表面形成具有扩散层和沉积层的Ti N渗镀层,然后在此渗镀层表面沉积(PVD法)TiB2薄膜,形成Ti N/TiB2复合渗镀层。并且将其与在碳钢基体表面直接沉积(PVD法)TiB2薄膜进行表面形貌、硬度、摩擦磨损性能对比。结果表明Ti N/TiB2复合渗镀层厚度可达十几微米,成分和硬度呈梯度分布,与基体是冶金结合,结合力好,无剥落现象。表面是均匀、致密、细小的胞状组织。表面平均硬度HV2600,平均摩擦因数小,耐磨性好。
TiN permeation layers composed of diffusion and deposition layers are synthesized on the surface of carbon steel using plasma point discharge, hollow cathode effect and reactive vapor deposition techniques. Subsequently TiB2 film was deposited （PVD） on this surface in order to form TiN/TiB2 multi permeation layers. In addition comparative research between this multi-permeation layers and TiB2 film （PVD） directly deposited on the carbon steel on the surface appearance, hardness and friction-abrasion of these samples acquired has been investigated. The results show that the thickness of TiN/TiB2 multi-permeation layer is above 10μm and all the composition, hardness is graded distribution. Secondly it is metallurgical bonding with substrate and the cohesion force is better without any desquamating phenomenon. Its surface appearance is composed of very uniform, compact and fine cellular structure and average hardness reach HV2600. But also mean friction coefficient is less and the wear resistance is better.
出处
《新技术新工艺》
2005年第10期60-63,共4页
New Technology & New Process
基金
国家自然科学基金
上海宝钢集团公司联合资助项目(50374050)
山西省自然科学基金项目(20031050)
关键词
空心阴极效应
尖端放电
TIN
TIB2
摩擦因数
耐磨性
hollow cathode effect, point discharge, TiN, TiB2, friction coefficient, wear resistance
