溶胶凝胶法制备二维气敏光学薄膜及其氨气敏光学性能研究

Using sol-gel method to manufacture two-dimension gassensing optical film and studying the film in ammonia vapor

本文研究了用溶胶凝胶法制作二维ＳｎＯ２：ＴｉＯ２混合薄膜（厚度小于１μｍ），并测量了它在氨气氛中的气敏透射谱，发现对低浓度很灵敏，且最佳灵敏区显示出对二维薄膜厚度的依从性。利用这些现象可制成对低浓度敏感且有气体选择性的气敏传感器件。

In this paper,we study sol-gel method to manufacture two-dimension SnO2:TiO2 compound film(thethickness of film are less than 1μm),and study the gas-sensing transmittivity spectrum in ammonia vapor,observethat the gas-sensing film response well in lower concentration,and the gas-sensing wavelength,in which the transmittivity increases,depends on the thickness of the two-dimension film. It is possible to use these phenomena tomake the gas-sensing film for lower concentration,hving the charactor of gas choice.