摘要
非晶态有机聚合物薄膜具有低介电常数，高强度等优良物理特性，在微电子工业领域有着潜在的应用价值而引起人们极大兴趣，本文就其沉积方法及沉积机制进行简要综述，并展望了其应用前景。
Non-crystal organic polymers, such as Teflon etc,have novel physical properties,which are low dielectric constant,high strength.It is of considerable interest from potential application in microelectronics industy.This paper reviews deposition method and deposition mechanism of the film.The prospect of the film application is looked ahead.
出处
《激光与光电子学进展》
CSCD
1996年第1期1-4,共4页
Laser & Optoelectronics Progress
