摘要
本文在分析产生和影响实用场发射电子枪(FEG)虚源半径各种因素的基础上,提出一种直接测量FEG虚源半径的新方法——场电子显微镜(FEM)法。用该法对一实际FEG的虚源半径作了实验测定,并与著名的球——锥面模型进行比较,结果是一致的。表明该方法不仅简单且行之有效,具有实用价值。
This paper puts forward a new method of measuring finite radius of the virtual source for practical field emission gun (FEG) on basis of analysing the factors and effecting finite radius of the virtual source. The method is called field-electron microscope method (FEM). Finite radius of the virtual source in practical FEG measured by using the method and the results shown:measured value is well consistent with the calculated value of the theory for spheroidal-cone model. The fact shows that the method is not only simple but also effective to the measurement of finite radius of the virtual source for FEG. It has higher practical value.
出处
《电子显微学报》
CAS
CSCD
1996年第1期67-74,共8页
Journal of Chinese Electron Microscopy Society
关键词
实验测量
场发射电子枪
虚源半径
场电子显微镜法
measurement
field emission gun
finite radius of the virtual source
field-electron microscope method