从美国ASTeX　Inc．公司的发展看微波等离子体在高新技术领域的应用前景

The Present Development of ASTeX Inc. in America Shows us the Great Expectation of Microwave Plasma and its Application

本文就美国“应用科学技术公司ＡＳＴｅＸＩｎｃ．”近几年来在研制、生产和销售先进的微波源，系列反应腔和成套微波等离子体加工设备等方面的快速发展状况，说明微波等离子体在新材料、微电子等高新科技领域的应用前景，并对比分析我国的现状和发展方向。

Having reviewed the recent advancing of ASTeX Inc.in America on its microwave plasma technology and products,the great expectation of microwave plasma application in the fields of new materials,microeletronics and other high technology has briefly been introduced in this paper,through which some experiences can be summarized for us to follow.