悬隔膜材料和制造工艺技术

Membrane Material and Fabrication Process Technology

综合分析比较了各种微传感器中悬隔膜材料和制造工艺技术的优缺点，从中选择工艺简单易行、性能稳定可靠以及与微电子技术相容的微传感器悬隔膜材料和制造工艺技术，以便提高微传感器成品率．

The advantages and weak points of various membrane materials and process technologies of the microsensor were analysed and compared comprehensively in this paper. The stable and reliable membrane materials and simple and practical fabrication process technologies are selected. These are compatible with the microelectronics process technology. The microsensors yield could be improved by the use of these membrane materials and fabrication process technologies.