超导／半导兼容材料的制作及性能分析

Fabrication of Superconductor/Semiconductor Compatible Material and Their Properties

介绍了几种结构合理的超导／半导兼容材料的制作技术及其测试结果，重点讨论了超导体（ＹＢＣＯ）与半导体（Ｓｉ，ＧａＡｓ）间缓冲层的选取，并对这几种复合材料的性能作了较详细的分析。

Fabrication technologies for several superconductor/semiconductor compatible materials are presented. Problems encountered in the fabrication are discussed, with emphasis on the choice of buffer layers between semiconductors and superconductors. The properties of these materials are analyzed in detail.