摘要
介绍了压电角速率传感器用敏感元件的焊接及密封工艺的改进。采用新工艺后,敏感元件的成本降低,可靠性提高及性能得到了改善。将该工艺应用到低频滤波器用谐振子中,同样得到了满意的结果。
Improvement on the bonding and sealing procedures of the sensing elements inpieloelectric angular rate sensor is introduced in this paper. After the new bonding and sealingtechniques have been used,the cost was lowered,and the stability and performances of the sensingelements were enhanced. Applying the new techniques to the resonators of low frequency filters,satisfied results are being obtained.
出处
《压电与声光》
CSCD
北大核心
1996年第2期136-138,共3页
Piezoelectrics & Acoustooptics
关键词
焊接
密封
敏感元件
谐振子
s: bonding,sealing,sensing element,resonator