压阻式传感器的应变与温度交叉灵敏度分析

The Analysis on the Crossed Sensitivity of Strain v/s Temperature of Piezoresistive Transducer

运用二元函数的泰勒展开式在给出压阻式传感器的应变和温度灵敏度的同时,也给出了应变与温度交叉灵敏度大小的公式,阐明了其物理意义,并结合实际测量数据估计了交叉灵敏度,对于实际使用传感器并进行补偿具有一定的指导意义。

With the help of Taylor expansion of dualistic fimetion, the sensitivity of strain and temperature of piezoresistive transducer is given and the formula of crossed sensitivity of strain v/s temperature is also presented. The physical meaning is expounded and the crossed sensitivity is estimated combining with practical measuring data. The method offers instructive significance in using transducers and for compensation.