用于MEMS中的硅基材料微观摩擦磨损性能研究

Study of Microtribological and Wear Properties of Silicon Material Applied to MEMS

利用原子力显微镜考察了Si(100)表面的粘附、摩擦磨损性能,试验考虑了外界湿度、循环扫描次数等因素的影响,并初步提出了解决方案。结果表明:在AFM摩擦试验中,压电陶瓷的滞后效应和非线性效应的影响比较显著;随着外界湿度的增加,湿度对Si(100)表面粘附力和摩擦系数有较大的影响;此外,外加载荷和扫描循环次数直接决定Si(100)表面的耐磨性能。

The adhesive and tribological properties were studied with an aterelic farce microscope （AFM）. Meanwhile, the effect of relative humidity and scanning cycles were taken into consideration. In addition, a resolusion was tried to be propused. The results indicate that the effect of hysteresis and nonlinear of the piezo-tube are significant on Ihe friction measurement with the AFM. The relative humidity exerts great influence on the adhesion and friction caeffieient of the Si （100） surlace when it goes larger gradually; Moreover, the applied load and sliding cycles directy determine the wear property of the Si（100）.