摘要
The usage of hydrofluoric acid (HF) or fluoride was believed to be indispensable in the fabrication of porous silicon (PSi) since its discovery. Here we report a novel method, metal - assisted - chemical - reaction - etching (MACRE) method, to prepare PSi without HF acid or fluoride. The prepared PSi possesses a noodle-like macro porous structure (silicon noodle). In this paper, the fabrication method, microstructure and photoluminescent properties of the silicon noodle are presented.
The usage of hydrofluoric acid （HF） or fluoride was believed to be indispensable in the fabrication of porous silicon （PSi） since its discovery. Here we report a novel method, metal - assisted - chemical - reaction - etching （MACRE） method, to prepare PSi without HF acid or fluoride. The prepared PSi possesses a noodle- like macro porous structure （silicon noodle）. In this paper, the fabrication method, microstructure and photoluminescent properties of the silicon noodle are presented.
出处
《光散射学报》
2005年第3期214-215,共2页
The Journal of Light Scattering
