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椭偏谱法测量类金刚石薄膜的质量 被引量：1

Ellipsometric Spectrum Study on Diamond-like Carbon Films
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摘要 应用椭偏光谱法研究了一系列不含氢DLC样品,讨论了样品制备与测量、模型的建立及多样品分析法和椭偏数据拟合,表明椭偏光谱法可以确定DLC膜的厚度,并可反映出sp3成份百分比变化与制备时偏置电压的关系. A series of hydrogen-free carbon films are prepared and spectroscopic ellipsometry is applied to study them. Sample preparation and measurement, model establishment, multi-sample analysis, ellipsometry data fitting are also discussed. The results show that the thicknesses of the diamond-like carbon films can be detemained and the fraction of sp^3 in the diamond-like carbon fihns has also been obtained. The correlation between the fraction of sp^3 and the biased voltage has been observed.
作者 杜泉 邓学儒 郭文胜
机构地区 西华大学应用物理研究所 四川大学电子信息学院
出处 《四川师范大学学报（自然科学版）》 CAS CSCD 北大核心 2005年第6期687-690,共4页 Journal of Sichuan Normal University（Natural Science）
关键词 椭偏光谱仪 类金刚石薄膜 sp^3/sp^2 多样品分析法 Ellipsometer Diamond-like carbon films sp^3/sp^2 Multi-sample analysis
分类号 O484.4 [理学—固体物理]
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参考文献8

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同被引文献12

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四川师范大学学报（自然科学版）
2005年 第6期

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