摘要
从溶胶制备、涂覆和热处理三个步骤介绍了溶胶-凝胶技术制备氧化物薄膜基本原理和工艺过程;对有关三个步骤的研究成果进行了综述。
[ Abstract] The fundamental principles and the technological process, which were prepared an oxide film by mens of sol-gel process, were introduced taking three steps, that is , the preparation of solvent adhe-sive , coating and heat treatment.
出处
《材料工程》
EI
CAS
CSCD
北大核心
1996年第5期21-23,共3页
Journal of Materials Engineering
关键词
溶胶-凝胶
氧化物
薄膜
旋转涂覆
热喷涂
sol-gel oxide film rotational coating immersing heat spraying
