摘要
文章分析了MKS公司生产的气体流量控制系统247CFour-ChannelReadout的工作原理,并通过实验得出系统的工作曲线,利用PC机并口和数模转换器的简单连接实现了该系统的自动化调节。其实现方法对一般微电压信号控制仪器的自动化改进有一定的参考价值。
The work theory of 247C Four-channel Readout produced by MKS corporation is expounded in this article firstly, then the voltage-flow curve of the equipment is obtained through a experiment in typical work condition. At last a voltage function generator is designed to make the mass flow Controller＇flow auto-adjusting, and the method how to use the voltage function generator to adjust the flow of mass flow Controller is elaborated in detail. This method could give some reference to the automatization of the equipment that dominated by micro-voltage too.
出处
《仪器仪表用户》
2005年第6期65-66,共2页
Instrumentation
基金
中国工程物理研究完基金(批号:20040215)资助
关键词
流量读数计
数模转换器
自动控制
Flow readout,Digital to analog converter,Automatization
