MEMS反射镜建模及其控制实验研究

Modeling of MEMS reflecting mirror and its control experimental research

从经典二阶振荡系统的传递函数入手,根据MEMS反射镜的开环瞬态响应实验,对模型的参数进行辨识,考察了模型在静态状况下静电力和弹簧扭矩的关系.推导了阻尼系数和实验曲线之间的关系.这个关系对阻尼系数的辨识不需要考察微镜的尺寸和空气压力,从而可以减轻计算量并且保证了精度.最后,通过仿真和实验结果来验证参数辨识的正确性.在实验和仿真结果中,系统的超调量被大幅度减小,稳定时间可以控制在7 ms以内,验证了模型参数辨识的正确性.

According to the transition function of the classic model of two-order oscillating system, a kind of micro electronic mechanic system（MEMS） reflecting mirror characteristic estimation method based on experiments was presented the equilibrium state between the electrostatic and elastic torque being considered. The relationship between the experiment curve and the damping coefficient was deduced. Because of the identification of the coefficient without the micro mirror＇s dimension and air pressure in the relationship, a great deal of computation would be simplified with sufficient accuracy. The validity of the parameters identification was verified experimentally. The overshot of the system was reduced clearly and the time of stability was limited within less than 7ms. It is concluded that the estimation method is effective.