高灵敏复合光波导在检测臭氧的应用研究

The Application of Highly Sensitive Composite Optical Waveguide in the Ozone Detection

介绍利用高灵敏复合光波导元件检测臭氧的一种新方法以及实验装置和臭氧的响应特征。通过在K+交换玻璃光波导表面形成高折射率TiO2(两端带斜坡带状)膜并在其表面上固定色素铜化酞箐(Coppertetra-(t-buthyl)phthalocyan ine,TBPcCu)而制成高灵敏度的复合光波导元件。臭氧存在时TBPcCu薄膜被氧化而退色,由此减弱TBPcCu膜对633nm的导波光的吸收。本元件具有响应速度快,灵敏度高和检测极限在0.02 mg/m3等特点。

An optical waveguide （OWG） sensor for the detection of ozone is reported. The highly sensitive element of this sensor is fabricated by coating the copper tetra-（t-butyl） phthalocyanine （TBPcCu） film over the TiO2 film, which formed from K ~ exchanged glass composite OWG. In the presence of ozone, the TBPcCu film changes from blue to colorless, which causes weaken absorption of the 633 nm guided wave. The experi- mental equipment and response characteristics are also described in details. The device has a short response time, high sensitivity, and approximate detection limit is below 0.02 mg/m^3.