摘要
介绍了一种用于差分电容检测前置电路的开关电路,该电路使信号易于解调而能简化信号处理电路.阐述了电路的工作原理及相关特性,在250 kHz的载波频率下,给出了Hspice仿真结果及其具体在微机械加速度计中的应用.实际结果表明:样品的灵敏度为16～25 mV/gn,非线性为0.1 %～0.5 %,满足技术要求.
A new kind of pre-circuit for differential capacitance test is introduced, which is constructed by a switched circuit. This circuit can bring facility to signal demodulation and predigest the signal processing circuit greatly. The circuit＇ s operation mechanism and its characteristics are investigated, The Hspice simulation results with Hspice and application in the micro-accelerometer, under the 250 kHz cartier wave are offered. The results show sensitivity of the sample is 16-25 mV/gn and linearity is 0.1%-0.5 %. It can meet the meeds of technology.
出处
《传感器技术》
CSCD
北大核心
2005年第11期73-75,共3页
Journal of Transducer Technology
关键词
开关电路
差分电容检测
前置电路
信号处理
加速度计
switched circuit
differential capacitance detection
pre-circuit
signal processing
accelerometer
