摘要
制作了一种新型磁膜结构射频集成微电感.该电感使用溶胶-凝胶法制备的CoZrO铁氧体作为磁性薄膜;采用平面单匝形式的金属线圈,从而形成“SiO2绝缘层/磁膜层(CoZrO)/SiO2绝缘层/Cu线圈”的结构,具有结构简单、制作工艺与常规集成工艺兼容等特点.同时,采用相同工艺同批制作了无磁膜微电感作为对比样品,并取各项结构参数与磁膜电感相一致.测试结果表明,2GHz处,磁膜结构微电感的感值(L)为1·75nH、品质因数(Q)为18·5,与无磁膜微电感相比,L和Q的值分别提高了25%和23%.
A novel RF integrated inductor with ferrite thin-film is fabricated. The inductor has a simple structure of “SiO2 insulating layer/magnetic thin-film（CoZrO）/SiO2 insulating layer/Cu coils”, in which a planar single-turn metal coil and a CoZrO ferrite thin-film fabricated by the Sol-Gel method are used. The fabrication process is compatible with standard integrated process. Inductors without the magnetic thin-film are fabricated as the referential sample using the same processes,in which the structure parameters are consistent with the inductor with magnetic thin-film. The inductance（L） of the inductor with magnetic thin-film is 1.75nH and the quality factor（Q） is 18. 5 at 2GHz. Compared with the inductor without magnetic thin-film,L and Q are raised by 25 % and 23 %, respectively.
基金
美国自然科学基金资助项目(批准号:0302449)~~
