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阴极电弧离子沉积TiN/Ti镀层腐蚀特性 被引量:10

Corrosion Behavior of the Vacuum Cathodic Arc Deposited TiN/Ti Coatings
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摘要 采用电化学线性极化、交流阻抗谱技术研究了不同基片偏压上阴极电弧沉积TiN/Ti镀层在50×10-6g/gCl-溶液中的腐蚀行为,并对镀层腐蚀的机理进行了探讨。结果表明:基片偏压–400V时,镀层耐蚀性能好;镀层表面的针孔是诱发镀层和基材体系发生点蚀、电偶腐蚀的主要缺陷。 TiN/Ti coatings were deposited at various substrates bias voltage by vacuum cathodic arc deposition. The corrosion behavior of the coatings in 50×10^-6 g/g KCI solution have been studied by potentiodynamic polarization, electrochemical impedance spectroscopy (EIS). The mechanicms of corrosion was discussed. The result indicate that the corrosion resistance of the coatings deposited at -400 V is significantly enhanced. Galvanic or crevice corrosion process of coatings are mainly caused by the coatings pinhole.
出处 《稀有金属材料与工程》 SCIE EI CAS CSCD 北大核心 2005年第11期1774-1777,共4页 Rare Metal Materials and Engineering
关键词 基片偏压 TiN/Ti镀层 针孔 腐蚀 substrates bias voltage TiN/Ti coatings surface work function pinhole corrosion
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参考文献7

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