玻璃基板上溶胶凝胶法铌酸锂薄膜的制备及其表征

Fabricate and Characterize the Lithium Niobate Thin Films Prepared on Glass Sub strate by Sol-gel Process

用溶胶凝胶法在玻璃基板上以LiNb(OR)6先驱体溶液(用甲酸作稳定剂,乙二酸作对照实验)制备了铌酸锂薄膜,并对薄膜进行了IR、XRD和SEM表征,结果表明,生成的铌酸锂为多晶,与乙二酸相比,用甲酸作稳定剂制备的铌酸锂薄膜形貌更好。

Lithium niobate thin films were prepared on glass substrate with LiNb （OR）6 precursor solution （stabilized by HCOOH and the compared experiment with H2C2O4 as stabilizer） by sol-gel process. The thin films were characterized by IR, XRD and SEM ,and the results that obtained Lithium niobate thin films were polycrystalline,and the morphology of Lithium niobate thin films stabilized by HCOOH was better than that of by H2C2O4.