摘要
介绍了新研制的高真空油扩散泵在拓宽抽气速率范围、提高临界前级压力、降低返油率方面的创新设计。给出了新研制的K-800A高真空油扩散泵各项技术指标的实测结果。
Introduces the newly developed K-800A HV oil diffusion pump for its design of broadened range of pumping speed, increased critical backing pressure and reduced backstreaming rate. Reveals the actual measurements of its main performance indices.
出处
《真空》
CAS
北大核心
2005年第6期16-18,共3页
Vacuum
关键词
油扩散泵
抽气性能
研制
返油率
oil diffusion pump
pumping capability
development
backstreaming rate
