制备ITO靶材的探索

Exploration of preparing ITO targets

ITO的用途越来越广泛。研究并且制备ITO靶材具有相当的战略意义。本文概述了ITO玻璃的用途和ITO膜的镀制方法,对目前国内ITO靶材加工和研究的现状进行了调查,提出了用爆炸方法压实ITO纳米粉末并附加烧结的工艺生产靶材的途径。借助粉末的压实理论,对粉末的爆炸压实进行了理论探索。并通过初步实验证实了爆炸法的可行性。

The ITO （indium-tin-oxide） films have been widely used in more and more fields. Their R＆D and preparation are therefore of strategic importance to several industrial developments. Introduces the applications of ITO glasses and the ways to coat ITO onto them, with an investigation made to discuss the ITO technologies currently used and researched in China and other countries for those targets. Proposes an approach to the preparation of targets by way of explosion to compact ITO nano-pwders and then form the targets through sintering. The process is discussed theoretically by resorting to the principle of powder compaction. And the feasibility of the explosive compaction was verified by tentative experiments.