双材料微梁阵列非制冷红外成像系统——微梁阵列的设计与制作

BIMATERIAL MICRO-CANTILEVER UNCOOLED INFRARED IMAGING SYSTEM——DESIGN AND FABRICATION OF MICRO-CANTILEVER ARRAY

给出了一种用于非制冷光学读出红外探测器的核心器件———双材料微悬臂梁阵列的设计和制作.微梁阵列是无硅基底的S iNx/Au双材料单层膜结构,其制作工艺简单、可以直接放在空气中成像.实验使用了设计制作的140×98微梁阵列和高信噪比的12-b it CCD,得到120℃以上的物体热像,噪声等效温度差(NETD)为7K左右,实验结果与热机械模型预测结果一致.

The design and fabrication of one-layer bimaterial micro-cantilever array made of silicon nitride （SiNx） and gold （Au） without Si substrate for uncooled optical readout infrared （IR） imaging system were presented. One-layer structure simplifies the fabrication process. IR thermal images can be obtained when the cantilever array is placed in the atmosphere. The experimental results with the micro-cantilever array of 140 × 98 elements and 12-bit CCD indicate that the objects at the temperature of higher than 120℃ can be detected and the noise-equivalent temperature difference （NETD） of the device is - 7K. The experimental results are well accordant with the thennomechanical design of micro-cantilever array.