基于电容模型的脉冲电解、电化学光整、蚀刻加工机理分析

Mechanism Analysis of the Pulsed Electrochemical Machining(PECM),Polishing(EP) and Micromachining(EMM) Based on a Capacity Model

用一个动态变化的电容模型来描述电化学加工过程,从一个全新的角度———电容,来解释电化学加工的机理。利用电极体系的等效阻抗的变化来解释脉冲电解中线性电解液非线性化的现象;通过界面双电层电容值的变化来解释脉冲电化学光整加工提高精度的根本原因;在脉冲电化学蚀刻中由于保护膜产生的类似电解电容效应,使该处的电容值显著变化,从而解决了在纯化学蚀刻中出现的侧向腐蚀问题。

A dynamically-changing model based on capacity is used to discribe the processs of ECM and to explain its mechanism from a completely new point of view, namely capacity. The change of equivalent impedence of the electrode system is used to explain the neutral linearity electrolyte change into nonlinearity in PECM. The reason for the improvement of precision by the EP is the change of double layer capacity value. The protection film in EMM leads to the creation of electrochemical capacity effects, and then leads to the change of interface capacity value. This is why the EMM hasn＇t the problem of etching under the protection film pure chemical machining.