摘要
In this paper, silica-on-silicon erbium-doped phosphosilicate glass film material was fabricated for optical waveguides by sol-gel method. Samples were characterized and analyzed. It is demonstrated that we have got well-distributed, good translucent, alterable thickness of film and glass state erbium-doped phosphosilicate films material for optical waveguides by sol-gel method.
In this paper, silica-on-silicon erbium-doped phosphosilicate glass film material was fabricated for optical waveguides by sol-gel method. Samples were characterized and analyzed. It is demonstrated that we have got well-distributed, good translucent, alterable thickness of film and glass state erbiumdoped phosphosilicate films material for optical waveguides by sol-gel method.
基金
This work was funded by National Emphases Basis Research andProgramming Project of China (3B8000061038) and InnovationFoundation of Jilin University (450011022214) .
