摘要
提出了一种基于标准件法的二次标定法,实现了对微距尺寸的高速高精度测量。该方法经过实验测量数据的分析对比,表明比标准件法测量精度有明显提高,满足了IC晶片线宽测量的精度要求。
A method of twice measure based on the standard component is presented, highaccuracy measurement for micro size is obtained. Through analysis and contrast of the experimental results, this method was obviously improved the precision compared with the law of standard component, and met the wide precision demands that measures of chip line of IC.
出处
《半导体技术》
CAS
CSCD
北大核心
2005年第12期35-37,43,共4页
Semiconductor Technology
基金
广东省科技计划攻关项目(2004A10403008)
关键词
标准件
像素当量
空间矩
亚像素
尺寸标定
standard ruler
per-pixel
spatial moment
sub-pixel
size calibration
