塑料(PMMA)微流控芯片微通道热压成形工艺参数的确定

Process Parameter Determination in Fabrication of Microchannel of Plastic (PMMA) Microfluidic Chips Using Hot-embossing Method

采用热压成形的方法制作塑料(PMMA)微流控芯片的微通道,其温度、压力和时间等工艺参数直接影响制作质量,而最佳的工艺参数取决于聚合物材料的流变特性。自行研制了用于塑料微流控芯片制作的热压成形机,能够对热压成形过程中的温度、压力进行精确的控制,利用该设备研究了PMMA在热压成形过程中的流变性能,通过获得的温度压力实验曲线,确定热压成形的温度,并研究了在该温度下压力对变形速率和复制精度的影响,从而确定热压工艺过程中的温度、压力和时间3个工艺参数。

Using hot embossing method to fabricate the microchannel of PMMA plastic microfluidic chips, the process perimeters, i.e. temperature, pressure and time, affect the quality directly. The best ones are determined by the rheological properties of the polymer materials, A hot-embossing machine, which can precisely control the temperature and pressure during hot-embossing process, was developed for fabrication of plastic microfluidic chips. With the equipment, the rheological property of PMMA was investigated. According to the acquired experimental curve of temperature and pressure, the hot-embossing temperature can be decided, and under this temperature, by studying the influences of pressure and hot-embossing time on the deformation rate and replicating accuracy, the process parameters of pressure and time can be settled.